HORIBA STEC KOREA | 호리바에스텍코리아

Company Name	HORIBA STEC KOREA
Booth Number	C129
Home Page	www.horiba.com
Main Phone	031-8025-6500

Company Introduction

HORIBA competencies in Fluid Control, Measurement and Analysis are enabling researchers, developers, original equipment 
manufacturers and end users to deliver novels solutions to global demands.

Introduction of item

1. Z700 Series(Mass Flow Meter)

The HORIBA's Mass Flow Controller is equipped with a line regulator, a pressure sensor, and a filter because the gas line in 
the multi-chamber is prone to crosstalk of the Mass Flow Controller due to pressure fluctuations.

2. Criterion D500(Pressure Insensitive Mass Flow Module)

The high level of performance provided by the CRITERION D500 ensures it can be used for a range of advanced 
semiconductor manufacturing processes; pressure insensitive, multi-range/multi-gas/multi-pressure, G-LIFE (Gas Law 
check of Integrated Flow restrictor Equation) Self-Diagnosis function, high accuracy, fast response, wide range, and all-
metal.