HUNETPLUS | 휴넷플러스

Company Name	HUNETPLUS
Booth Number	C103
Home Page	www.hunetplus.com
Main Phone	041-900-7500

Company Introduction

Huneplus's main business areas include advanced display materials, semiconductor materials, and advanced printing businesses that 
integrate hybrid materials and lithography technology.

Introduction of item

1. Top Coating materials for LED(1000A, 1000B, 2000, 5000)

Organic-inorganic hybrid coating materials for LED encapsulation with excellent light transmittance, heat resistance, low shrinkage, and 
crack resistance based on the following technology. 
1) Molecular design for high transparency and yellowing resistance
2) Formulation design for very low shrinkage after curing  using one-component

Features and Specification
- Transmittance >95% (UVC~visible)
- One-component type (solvent-free): thermal curing
- Crack free@180℃/1h & 250℃/3min

2. Vertically Tailored Hybrid Multilayer EUV Resists for EUV Lithography(ML-EUV® Series)

ML-EUV® is ultra fine pattern EUV resist that is a vertically tailored organic-inorganic hybrid multilayer composed of organic and 
inorganic precursors.
ML-EUV® is state-of-the-art and next-generation EUV resist satisfying resolution, sensitivity, and line edge roughness(LER) at the same 
time compared to current polymer based chemically amplified EUV resist and metal oxide EUV resist.  

Spec.
- Line edge roughness: 1.37 nm
- Sensitivity: 66.10 mJ/cm2
- Resolution: 13.8 nm
- Surface roughness: sub-0.2 nm