HANBAEK PRECISION CORPORATION | 한백정밀

Company Name	HANBAEK PRECISION CORPORATION
Booth Number	H106
Home Page	ehanbaek.com
Main Phone	031-508-1796

Company Introduction

HANBAEK PRECISION CORP., established in 2017, prioritizes customer satisfaction above all. We specialize in manufacturing high-quality 
semiconductor wafer vacuum chucks, porous chucks, flow meters, and precision components including ESC chucks for Display.

Introduction of item

1. Semiconductor Wafer Vacuum Chuck(HBC)

⊙Size : 6”, 8”, 12”
⊙Material : AL6061, SUS304, SUS316, Beryllium, Copper, OFHC(Oxygen free High Conductivity Copper), Beryllium Copper
⊙Brazing : 2floor, 3floor, 4floor

Semiconductor Wafer Vacuum Chuck
Hanbaek's semiconductor wafer vacuum chuck is a critical component of semiconductor manufacturing equipment, designed to securely 
hold wafers in place while ensuring their flatness and parallelism throughout various manufacturing processes. Our vacuum chucks 
maintain flatness tolerances of 3μm or less for oxygen-free high conductivity copper (OFHC), aluminum, and SUS materials. We can 
process wafers in sizes of 6 inches, 8 inches, and 12 inches. Additionally, we offer brazing options for 2 Floor, 3 Floor, and 4 Floor 
configurations to ensure compatibility with advanced processing technologies.

2. Semiconductor Porous Chuck(HBCP)

⊙ Size: 370 * 370 *6T, 550 * 550 * 7T 
⊙ Material:
*Physical Property - Si02 . Al203 etc 
*Body base - Aluminum, Ceramic   
⊙ Color: Black(B)
⊙ Pore Size: 25µm
 
Hanbaek's semiconductor porous chucks are essential in processes like lithography, etching, chemical vapor deposition (CVD), and other 
semiconductor manufacturing stages. They ensure the wafer is held safely and effectively, enabling precise manufacturing.