PHOENIX CO., LTD. | 피닉스

Company Name	PHOENIX CO., LTD.
Booth Number	J112
Home Page	www.phoenixeq.kr/
Main Phone	031-531-5330

Company Introduction

※We are scientific and technological enterprise that develops and manufactures precision moving workpiece tables with micron and 
nano precision for semiconductor and universal semiconductor industry. We are committed to providing customers with high-quality 
products and services, and providing customers with tailor-made solutions.

Introduction of item

1. Precision motion Platform - Wafer Inspection Module(Etable)

The precision displacement platform is suitable for wafer detection, processing and other related fields. The upper sucker is compatible 
with 12 - and 8-inch wafer adsorption. This module contains two degrees of freedom displacement and three motion functions. The 
rotation axis can realize the rotation displacement of the wafer after adsorption. The PIN axis nested in the Z axis can realize the 
automatic loading and unloading function of the wafer.

2. Precision motion platform-ZTT posture adjustment module

This module is commonly used in semiconductor devices. Its structure is a three-axis parallel mechanism. It consists of three Z-oriented 
motors arranged in an equilateral triangle. A vertical z-displacement is provided when the three motors move together. Any two of the 
three motors moving in the same direction and the other motor moving in the opposite direction can provide two angle-adjusted 
motions of RX and RY. This mechanism is suitable for the use of semiconductor wafer attitude adjustment and focusing.