VAD INSTRUMENT | 브이에이디 인스트루먼트

Company Name	VAD INSTRUMENT
Booth Number	E103
Home Page	www.vadi.co.kr
Main Phone	031-768-6581

Company Introduction

Staring as a precision stage solution provider in 2015, VAD has been providing semiconductor and FPD process
related precision motion stages with outstanding quality
to customers. Although VAD is a small and medium sized enterprises, VAD is concentrating all its capabilities on
technology development with a constant passion to provide the best value and service to customers.VAD is
striving to be a stage and parts supplier with technology that can compete in the global market and differentiated
quality competitiveness.All of the VAD members as one do its best to make customers feel happier by putting
faith in the future into products and services.

Introduction of item

1. XYT+Z Stage (Wafer Inspection)

* Based on extensive on-site experience in manufacturing ultra-precision stages required for semiconductor
processes, this equipment produces and supplies stages for semiconductor processing equipment. With the
continuous increase in demand in the semiconductor market, the marketability of our products, which excel in
high-end applications due to their superior positional accuracy, is considered very high
* Spec
- Straightness : ±1.0um ~ ±3.0um
- Flatness : ±3.0um ~ ±5.0um
- In-position stability : ±10 nm ~ ±50 nm
- Repeatability : ±0.15um ~ ±0.3um
- Controller : ACS MC4U / ACS NPMpm
- Isolator : Passive Isolator / Active Isolator