NANOSYSTEM | 나노시스템

Company Name	NANOSYSTEM
Booth Number	C114
Home Page	www.nanosystemz.com
Main Phone	042-717-2400

Company Introduction

NanoSystem, a global leader in measurement and inspection, provides ultra-precision optical solutions for micro-shape and surface 
roughness measurement, enhancing quality, yield, and R&D in IT industries.

Introduction of item

1. NSW-300 Series(Wafer Backend 3D/2D CD Metrology System)

Wafer coordinate-based recipe creation and wafer mapping
High-speed, high-accuracy 3D measurement
Compatible with various wafer sizes
Essential measurement solutions including RDL, UBM, bump, and film thickness
Modular configuration to meet diverse measurement needs
Fully automated system compliant with SEMI standards

2. NSF-Series(3D Surface Profiling Automation System)

Outputs hundreds of parameters for substrate pattern/shape
High measurement speed and accuracy
Intuitive and user-friendly GUI
Repeatability within 0.5%
Capable of fine-pitch measurement (2/2 μm)
Automated measurement system using recipes