하이델베르크인스트루먼트코리아 | HEIDELBERG INSTRUMENTS KOREA

회사명	하이델베르크인스트루먼트코리아
부스번호	D108
홈페이지	www.himt.kr
대표전화	042-482-1668

기업소개

하이델베르크 인스트루먼트는 high precision Laser lithography, Maskless aligner, Nanofabrication 분야의 global leader입니다. 1984년 설립이
후 40여년간 50개 이상의 국가에 1,500대 이상의 system을 공급함으로써, micro-nanoscale surface structuring에 대한 solution을 제공해왔습니다. 
Compact tabletop tool에서 advanced photomask production equipment까지, 그리고 Micro-Optics, MEMS, Photonics, Semiconductors, 
Advanced packaging (3D IC), Quantum technologies, Microfluidics, and 2D Materials 등 미세 패터닝을 요구하는 다양한 응용분야에서 활용되고 
있습니다.

제품소개

1. Laser Lithography System (MLA150)

The MLA 150 is a state-of-the-art Maskless Lithography tool. Areas of application include nanofabrication of quantum devices (2D 
materials, semiconductor materials, nanowires, etc.) MEMS, micro-optical elements, sensors, actuators, MOEMS and other devices for 
materials and life sciences. Depending on the application, the MLA 150 patterns high-resolution, high aspect ratio, and even simple 
grayscale structures.

2. Laser Lithography System

The MLA 300 provides high throughput, a simplified workflow, and integration with manufacturing execution systems (MES). This tool is 
used for the production of sensors and sensor ICs, MEMS, and microfluidic devices. Other applications include discrete electronic 
components, analog and digital ICs, ASICs, power electronics, OLED displays, and advanced packaging.