NANOSYSTEM | 나노시스템

Company Name	NANOSYSTEM
Booth Number	C126
Home Page	www.nanosystemz.com
Contact	042-717-2400

Company Introduction

NanoSystem, a global leader in measurement and inspection, provides ultra-precision optical solutions for micro-shape and surface 
roughness measurement, enhancing quality, yield, and R&D in IT industries.

Introduction of Products

1. Wafer Backend 3D/2D CD Metrology System (NSW-300 Series)

Outputs hundreds of parameters for substrate pattern/shape
High measurement speed and accuracy
Intuitive and user-friendly GUI
Repeatability within 0.5%
Capable of fine-pitch measurement (2/2 μm)
Automated measurement system using recipes

2. 3D Surface Profiling Automation System (NSF-Series)

Outputs hundreds of parameters for substrate pattern/shape
High measurement speed and accuracy
Intuitive and user-friendly GUI
Repeatability within 0.5%
Capable of fine-pitch measurement (2/2 μm)
Automated measurement system using recipes