HEIDELBERG INSTRUMENTS KOREA | 하이델베르크인스트루먼트코리아

Company Name	HEIDELBERG INSTRUMENTS KOREA
Booth Number	D108
Home Page	www.himt.kr
Contact	042-482-1668

Company Introduction

Heidelberg Instruments is a global leader in high-precision laser lithography, maskless aligners, and nanofabrication tools. Since 1984, 
with over 1,500 systems installed in more than 50 countries, we’ve provided solutions for micro-nanoscale surface structuring, and from 
compact tabletop tools to advanced photomask production equipment, for various applications such as Micro-Optics, MEMS, Photonics, 
Semiconductors, Advanced packaging (3D IC), Quantum technologies, Microfluidics, and 2D Materials etc.

Introduction of Products

1. Laser Lithography System (MLA150)

The MLA 150 is a state-of-the-art Maskless Lithography tool. Areas of application include nanofabrication of quantum devices (2D 
materials, semiconductor materials, nanowires, etc.) MEMS, micro-optical elements, sensors, actuators, MOEMS and other devices for 
materials and life sciences. Depending on the application, the MLA 150 patterns high-resolution, high aspect ratio, and even simple 
grayscale structures.

2. Laser Lithography System

The MLA 300 provides high throughput, a simplified workflow, and integration with manufacturing execution systems (MES). This tool is 
used for the production of sensors and sensor ICs, MEMS, and microfluidic devices. Other applications include discrete electronic 
components, analog and digital ICs, ASICs, power electronics, OLED displays, and advanced packaging.