WIZOPTICS | 위즈옵틱스

Company Name	WIZOPTICS
Booth Number	A127
Home Page	www.wizoptics.com/
Contact	031-477-3785

Company Introduction

WizOptics is a Korean company specializing in optical and metrology solutions for R&D and process evaluation. It supplies 
ellipsometers, 3D surface profilers, wafer inspection systems, and wavefront measurement equipment, along with professional 
technical support.

Introduction of Products

1. ellipsometer (Alpha-SE)

J.A. Woollam’s alpha-SE is a spectroscopic ellipsometer that simultaneously measures 180 wavelengths across a spectral range of 380–
900 nm. It supports angles of incidence of 65°, 70°, 75°, and 90°, with data acquisition times of 3, 10, or 30 seconds. Equipped with a 
rotating compensator and CCD detector, it rapidly analyzes thin-film thickness and refractive index and is suitable for dielectrics, 
semiconductors, organic materials, SiC, and coatings on glass.

2. Non-contact 3D Surface Profiler (Zegage pro)

ZYGO ZeGage Pro is a non-contact 3D optical surface profiler based on Coherence Scanning Interferometry (CSI). It measures surface 
roughness, step height, and 3D form with nanometer-level precision. SureScan technology enables stable operation on the production 
floor without a vibration isolation table. The system supports 1×–50× objectives, Mx analysis software, and ISO 25178-compliant 
surface measurements.