NOVA | 노바

Company Name	NOVA
Booth Number	B125
Home Page	www.novami.com/
Contact	073-229-5600

Company Introduction

Nova is a leading global innovator and key provider of advanced dimensional, materials, and chemical metrology and process control 
solutions used in semiconductor manufacturing.

Introduction of Products

1. Nova i550® AP Integrated Metrology Tool

Market-leading, high-performance integrated metrology for CMP process control, quipped with dedicated hardware and software to 
support Advanced Packaging related CMP challenges

2. Nova WMC™ Stand-Alone Optical Metrology Tool

High-end optical metrology platform for 2.5D and 3D Advanced Packaging processes, designed to address major challenges such as high 
warpage, non-symmetric shapes, and different surface conditions.