Korea I.T.S. | 한국아이티에스

Company Name	Korea I.T.S.
Booth Number	C107
Home Page	www.koreaits.com
Contact	02-421-4022

Company Introduction

Since its inception in 1987, Korea ITS Co., Ltd. has grown alongside our customers by continuously introducing X-ray analytical 
instruments and cutting-edge technologies in related fields to the domestic market.

Introduction of Products

1. Nano&Micro probing system (In-situ Nanoprobing system)

Nanoprobing equipment that can be used within the Scanning Electron Microscope (SEM) demonstrates excellent performance in 
failure analysis for semiconductors and packaging. For example, filament/pore defect localization using EBAC/RCI/EBIRCh.
Position Resolution : Min. 0.02nm

2. X-ray CT (CT-Lab HR 160)

The high-resolution Nano CT CT Lab HR160 is a nano X-ray CT system equipped with a 160 kV nano-focus X-ray source and a 2D X-ray 
detector with a scanning area of φ250 mm × H450 mm.

The system delivers CT images with a spatial resolution of up to 250 nm, enabling ultra-high-resolution imaging for detailed, non-
destructive inspection and analysis of internal structures.