KCTECH | 케이씨텍

Company Name	KCTECH
Booth Number	F102
Home Page	www.kctech.co.kr
Contact	031-670-8000

Company Introduction

KCTech is a leading technology company specializing in CMP equipment and slurry materials for advanced semiconductor and display 
industries. Established in November 2017 through a spin-off, KCTech delivers customized solutions and superior quality through 
continuous innovation and dedicated R&D, aiming to become the most trusted global technology partner that creates value.

Introduction of Products

1. Chemical Mechanical Polishing Equipment (Ventus S / Ventus D)

1. Productivity 30% ↑
 Speedy Wafer Transfer (Turret, Robot)
 1~4 Step Flexible Polishing Chamber Possible
 Overhead Time 30%↓

2. Maximizing Defect Control
 Cleaner 6 Chamber(Flexible Operation)
 Separated Platen→Contamination Prevention

3.New Upgrade Module 
 10z Carrier, EPC(G4), Conditioner(G2)
 EPD, Brush(G2), ICM(Pad Buff), DRY(2.1)

2. HBM용 CMP Slurry, Interposer Layer CMP Slurry, Substrate Layer CMP Slurry (Si Slurry, TSV Reveal Slurry, Cu CMP Slurry, Ti CMP Slurry, BF, PID, EMC CMP Slurry)

1. HBM CMP Slurry
Si Thinning High Removal Rate Slurry
Silica Based Slurry,  RR >1.5um/min,Ra <0.5nm
2. TSV Reveal CMP Slurry
Silica Based Slurry , Oxide RR >3,000Å/min
SiN & Cu & Ta/TaN Tunable
3. Hybrid Bonding CMP Slurry
High Oxide Removal Rate & SiCN Stop Performance Slurry
Silica Based Slurry , Oxide RR >3,000Å/min
SiCN Stop, Cu & Ta/TaN Tunable
RDL (Redistribution Layer) Slurry
Ceria Based Slurry, Oxide RR >1um/min