하이델베르크 인스트루먼트 코리아 | HEIDELBERG INSTRUMENT

회사명	하이델베르크 인스트루먼트 코리아
부스번호	L112
홈페이지	www.himt.kr
대표전화	042-482-1668

기업소개

하이델베르크 인스트루먼트는 고정밀 패터닝을 필요로 하는 나노 및 마이크로 분야를 선도하는 글로벌 기업으로서 정교하게 제작된 Laser 및 Scanning 
Thermal Probe lithography system을 활용하여 MEMS, Micro-optics, Advanced Packaging (3DIC) IC, Flat Panel Displays (FPD), Micro-
fluidics, Sensor, Photonics,  2D & 3D patterning 등의 나노 및 마이크로 구조의 패턴을 제작할 수 있다.

제품소개

1. Laser Lithography System

MLA150

The MMLA 150 is a state-of-the-art Maskless Lithography tool. Areas of application include nanofabrication of quantum devices (2D 
materials, semiconductor materials, nanowires, etc.) MEMS, micro-optical elements, sensors, actuators, MOEMS and other devices for 
materials and life sciences. Depending on the application, the MLA 150 patterns high-resolution, high aspect ratio, and even simple 
grayscale structures.

2. Laser Lithography System

MLA300

The MLA 300 provides high throughput, a simplified workflow, and integration with manufacturing execution systems (MES). This tool is 
used for the production of sensors and sensor ICs, MEMS, and microfluidic devices. Other applications include discrete electronic 
components, analog and digital ICs, ASICs, power electronics, OLED displays, and advanced packaging.