HEIDELBERG INSTRUMENT | 하이델베르크 인스트루먼트 코리아

Company Name	HEIDELBERG INSTRUMENT
Booth Number	L112
Home Page	www.himt.kr
Main Phone	042-482-1668

Company Introduction

Heidelberg Instruments is one of the leading company in the development and production of high-precision nano and micro fabrication 
tools. Laser lithography systems are used for efficient direct imaging field such as semiconductor, MEMS, Micro-optics, Photonics and 2D 
& 3D structures.

Introduction of item

1. Laser Lithography System

MLA150

The MMLA 150 is a state-of-the-art Maskless Lithography tool. Areas of application include nanofabrication of quantum devices (2D 
materials, semiconductor materials, nanowires, etc.) MEMS, micro-optical elements, sensors, actuators, MOEMS and other devices for 
materials and life sciences. Depending on the application, the MLA 150 patterns high-resolution, high aspect ratio, and even simple 
grayscale structures.

2. Laser Lithography System

MLA300

The MLA 300 provides high throughput, a simplified workflow, and integration with manufacturing execution systems (MES). This tool is 
used for the production of sensors and sensor ICs, MEMS, and microfluidic devices. Other applications include discrete electronic 
components, analog and digital ICs, ASICs, power electronics, OLED displays, and advanced packaging.