HEIDELBERG INSTRUMENT KOREA | 하이델베르크 인스트루먼트 코리아

Company Name	HEIDELBERG INSTRUMENT KOREA
Booth Number	L104
Home Page	www.heidelberg-instruments.com
Main Phone	042-482-1668

Company Introduction

Heidelberg Instruments is a global leader in high-precision laser lithography, maskless aligners, and nanofabrication tools. With over 
1,500 systems installed in more than 50 countries since 1984, we provide solutions for micro-nanoscale surface structuring, and from 
compact tabletop tools to advanced photomask production equipment, for various applications such as Micro-Optics, MEMS, Photonics, 
Semiconductors, Advanced packaging (3D IC), Quantum technologies, Microfluidics, and 2D Materials etc.

Introduction of item

1. Maskless Aligner

MLA300

- Minimum Lines and Spaces : < 2um 
- CD Uniformity : < 200 nm
- Edge roughness : < 80 nm
- 2nd Layer alignment : < 500nm
- Maximum exposure area : 300mm x 300mm (12inch wafer)
- High power diode laser : 375nm or/and 405nm 
- Autofocus dynamic range : up to 150um

2. Maskless Aligner

MLA150

- Minimum Lines and Spaces : < 450 nm 
- CD Uniformity : < 100 nm
- Edge roughness : < 60 nm
- 2nd Layer alignment : < 500nm
- Maximum exposure area : 200mm x 200mm (8inch wafer)
- High power diode laser : 375nm or/and 405nm 
- Autofocus dynamic range : up to 180um